Téléchargez le livre : Multilayer Integrated Film Bulk Acoustic Resonators

Multilayer Integrated Film Bulk Acoustic Resonators

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Springer


Paru le : 2012-08-28

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Description

Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices.
Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices.
Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.
Pages
154 pages
Collection
n.c
Parution
2012-08-28
Marque
Springer
EAN papier
9783642317750
EAN EPUB
9783642317767
Informations sur l'ebook
Nombre pages copiables
1
Nombre pages imprimables
15
Taille du fichier
3062 Ko
Prix
94,94 €

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