Téléchargez le livre : Semiconductor Materials Analysis and Fabrication Process Control

Semiconductor Materials Analysis and Fabrication Process Control



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North Holland


Paru le : 2012-12-02



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Description
There is a growing awareness that the successful implementation of novel material systems and technology steps in the fabrication of microelectronic and optoelectronic devices, is critically dependent on the understanding and control of the materials, the process steps and their interactions. The contributions in this volume demonstrate that characterisation and analysis techniques are an essential support mechanism for research in these fields. Current major research themes are reviewed both in the development and application of diagnostic techniques for advanced materials analysis and fabrication process control. Two distinct trends are elucidated: the emergence and evaluation of sophisticated in situ optical diagnostic techniques such as photoreflectance and spectroellipsometry and the industrial application of ultra-high sensitivity chemical analysis techniques for contamination monitoring. The volume will serve as a useful and timely overview of this increasingly important field.
Pages
352 pages
Collection
n.c
Parution
2012-12-02
Marque
North Holland
EAN papier
9780444899088
EAN PDF SANS DRM
9780444596918
Informations sur l'ebook
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Prix
57,97 €

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