Téléchargez le livre : Reliability of MEMS

Reliability of MEMS

Testing of Materials and Devices de

,

Éditeur :

Wiley-VCH


Collection :

Advanced Micro and Nanosystems

Paru le : 2013-03-26

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101,39 €
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Description
This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
Pages
324 pages
Collection
Advanced Micro and Nanosystems
Parution
2013-03-26
Marque
Wiley-VCH
EAN papier
9783527335015
EAN PDF
9783527675036
Informations sur l'ebook
Nombre pages copiables
0
Nombre pages imprimables
324
Taille du fichier
24904 Ko
Prix
101,39 €

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