Téléchargez le livre : Science and Technology of Defects in Silicon

Science and Technology of Defects in Silicon

de

, ,

Éditeur :

North Holland


Paru le : 2014-01-01

eBook Téléchargement ebook sans DRM
57,97 €
Téléchargement immédiat
Dès validation de votre commande
Image Louise Reader présentation

Louise Reader

Lisez ce titre sur l'application Louise Reader.

badge apple Application Louise Reader
badge Android Application Louise Reader
Description
This volume reviews recent developments in the materials science of silicon. The topics discussed range from the fundamental characterization of the physical properties to the assessment of materials for device applications, and include: crystal growth; process-induced defects; topography; hydrogenation of silicon; impurities; and complexes and interactions between impurities.In view of its key position within the conference scope, several papers examine process induced defects: defects due to ion implantation, silicidation and dry etching, with emphasis being placed on the device aspects. Special attention is also paid to recent developments in characterization techniques on epitaxially grown silicon, and silicon-on-insulators.
Pages
518 pages
Collection
n.c
Parution
2014-01-01
Marque
North Holland
EAN papier
9780444886194
EAN PDF SANS DRM
9780080983646
Informations sur l'ebook
Prix
57,97 €

Suggestions personnalisées