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Télécharger le livre : Laser Heat-Mode Lithography
Jingsong Wei
Laser Heat-Mode Lithography
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical...
Editeur : Springer
Parution : 2019-11-20
Collection : Springer Series in Materials Science
Format(s) : PDF, ePub
94,94 €
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