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Télécharger le livre : Computational Lithography
Gonzalo R. Arce , Xu Ma
Computational Lithography
A Unified Summary of the Models and Optimization Methods Used in Computational Lithography Optical lithography is one of the most challenging areas of current integrated circuit manufacturing technology. The semiconductor industry is relying more on resolution...
Editeur : Wiley
Parution : 2011-01-06
Collection : Wiley Series in Pure and Applied Optics
Format(s) : PDF, ePub
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