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Télécharger le livre : Nanopositioning Technologies
Xinyu Liu , Changhai Ru , Yu Sun
Nanopositioning Technologies
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices,...
Editeur : Springer
Parution : 2015-12-22

Format(s) : PDF, ePub
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